Patterning Si by using surface functionalization and microcontact printing with a polymeric ink

Korean Journal of Chemical Engineering

Volumn 20, Issue 5, 2003, Pages 956-959

  Lee, Kyung Bok ^a   Kim, Dong Jin ^a   Yoon, Kuk Ro ^a   Kim, Yongseong ^b   Choi, Insung S ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Kyungnam University   (South Korea)

Author keywords

Microcontact printing ( CP); Pattern generation; Self assembled monolayers (SAMs); Si etching

Indexed keywords

CARBOXYLIC ACIDS; CHEMICAL MODIFICATION; ETCHING; FUNCTIONALLY GRADED MATERIALS; MONOLAYERS; SELF ASSEMBLY; SILICA; SUBSTRATES; THIN FILMS;

MICROCONTACT PRINTING; POLYETHYLENE IMINE; POLYMERIC INK; SELF ASSEMBLED MONOLAYERS; SILOXANES; SURFACE FUNCTIONALIZATION;

SILICON;

EID: 0344961210     PISSN: 02561115     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02697305     Document Type: Article

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