Patterning indium tin oxide and indium zinc oxide using microcontact printing and wet etching

Langmuir

Volumn 18, Issue 1, 2002, Pages 194-197

  Breen, Tricia L ^a   Fryer, Peter M ^a   Nunes, Ronald W ^a   Rothwell, Mary E ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

WET ETCHING;

ACIDS; ELASTOMERS; ETCHING; INK; MICROELECTRONICS; MULTILAYERS; PRINTING;

INDIUM COMPOUNDS;

ETCHING; INDIUM COMPOUNDS; PRINTING;

EID: 0037039594     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la015543g     Document Type: Article

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