Microfabricated thermally actuated microrobot

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 3, Issue , 2003, Pages 2960-2965

  Bonvilain, Agnès ^a   Chaillet, Nicolas ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); FABRICATION; GOLD; INSULATING MATERIALS; MICROACTUATORS; MOBILE ROBOTS; PIEZOELECTRIC DEVICES; RESINS; SILICON;

JOULE EFFECT; MICROFABRICATION; MICROROBOT; THERMAL BIMORPH ACTUATOR;

ROBOTICS;

EID: 0344896807     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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3. Thorbjörn Ebefors, Johan Ulfstedt-Mattsson, Edvard Kalversten, Göran Stemme, "A Walking Silicon Micro-Robot", 10th Int Conference on Solid-State Sensors and Actuators (Transducers'99), 7-10 june 1999, Sendai, Japan, pp 1202-1205.
4. Richard Yeh, Ezekiel J. J. Kruglick and Kristofer S. J. Pister; "Surface-micromachined components for articulated microrobots"; Journal of microelctromechanical systems; Vol. 5; No1; pp 10-17; march 1996.
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8. J. Agnus, A. Bonvilain, G. Cabodevila, N. Chaillet, Y. Haddab, P. Rougeot "Study and Development of a Station for Manipulation Tasks in the Microworld", SPIE Conference on Microrobotics and Microassembly, Vol. 3834, pp 141-152, Boston, September 1999.
9. Agnès Bonvilain, Nicolas Chaillet, "Some Prototypes of Silicon-based Thermal Actuated Microlegs for an Insect-like Microrobot", Mechatronics'01, Besancon France, september 2001.
10. Agnès Bonvilain, Nicolas Chaillet, "Fabrication and Experimentation of Microlegs for an Insect-like Microrobot", International Conference on Microrobotics and Microassembly III, Spie Vol. 4568, pp 163-174, Boston USA, october 2001.
11. Agnès Bonvilain, Jean René Coudevylle, Pascal Blind, Nicolas Chaillet, "Micromachined Thermal Actuated Microlegs for an Insect-like Microrobot", International Conference on Micromachining and Microfabrication process technologie VII, Spie Vol. 4557, pp 403-414, San Francisco USA, october 2001.
12. Wen-Hwa Chu, Mehran Mehregany, Robert L Mullen; "Analysis of tip deflection and force of a bimetallic cantilever microactuator"; Journal Micromechanic and Microengeneering; No 3; pp 4-7; 1993.