Micromachined thermal actuated microlegs for an insect-like microrobot

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4557, Issue , 2001, Pages 403-414

  Bonvilain, Agnès ^a   Coudevylle, Jean Renè ^b   Blind, Pascal ^c   Chaillet, Nicolas ^a  

^a FEMTO ST INSTITUTE   (France)

^b CNRS   (France)

^c Centre de Transfert des Microtechniques (CTM)   (France)

Author keywords

Insect; Microfabrication; Microlegs; Microrobot; Thermal actuators

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); MICROACTUATORS; ROBOTS; SILICON WAFERS;

MICROROBOTS; THERMAL MICROACTUATORS;

MICROMACHINING;

EID: 0035765751     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.442972     Document Type: Article

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