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Volumn , Issue , 1989, Pages 141-145
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Is micromechanics becoming a new subject for academic courses, or the design of a piezoelectric on silicon microrobot
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
ELECTRIC MOTORS--FRACTIONAL HORSEPOWER;
MECHANISMS;
PIEZOELECTRIC DEVICES;
PIEZOELECTRIC ACTUATOR;
PIEZOELECTRIC MOTOR;
PIEZOELECTRIC ON SILICON MICROROBOT;
PIEZOELECTRIC VS. ELECTROSTATIC MOTOR;
ROBOTICS;
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EID: 0024875908
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (4)
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References (11)
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