Dynamic characteristics measurement system for optical scanning micromirror

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4230, Issue , 2000, Pages 180-186

  Chiou, J C ^a   Lin, Y C ^a   Chang, Y C ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Optical performance of micromirror; Scan angle; Scan non linearity; Scan speed; Scanning micromirror

Indexed keywords

MICROELECTROMECHANICAL DEVICES; OPTICAL DEVICES; OPTICAL SYSTEMS; PHOTODETECTORS; SCANNING; TRANSIENTS;

OPTICAL SCANNING MICROMIRRORS;

MIRRORS;

EID: 0034453492     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.404902     Document Type: Conference Paper

References (7)

1. Scanning and rotating micromirrors using thermal actuators
2. Thermal microactuators for surface-micromachined processes
3. Microfabricated hinges