SAMPLE (Sandia Agile MEMS Prototyping, Layout tools, and Education)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3223, Issue , 1997, Pages 10-16

  Barron, Carole Craig ^a   Davies, Brady R ^a   Sniegowski, Jeffry J ^a   Rodgers, M Steven ^a   Comtois, John H ^b   Michalicek, M Adrian ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Chemical mechanical polishing (CMP); Microelectromechanical systems (MEMS); Silicon micromachining; Surface micromachining

Indexed keywords

AGILE MANUFACTURING SYSTEMS; CHEMICAL MECHANICAL POLISHING; CHEMICAL POLISHING; CURRICULA; ELECTROMECHANICAL DEVICES; MACHINING; MECHATRONICS; MEMS; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROFABRICATION; MICROMACHINING; MICROMECHANICS; NANOTECHNOLOGY; POLISHING; POLYSILICON; SURFACE MICROMACHINING; TECHNOLOGY;

DESIGN RULES; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROMACHINES; MICROMACHINING TECHNOLOGIES; PLANAR STRUCTURES; PLANARIZATION; POLYSILICON LAYERS; PROTOTYPING; SACRIFICIAL OXIDES; SILICON MICROMACHINING;

COMPOSITE MICROMECHANICS;

EID: 0344411528     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284476     Document Type: Conference Paper

References (6)

1. Surface Micromachined Microengine, E. J. Garcia and J. J. Sniegowski, Sensors and Actuators A 48 (1995) 203-214.
2. J. H. Smith, S. Montague, J. J. Sniegowski, J. Murray, and P.J. McWhorter, "Embedded Micromechanical Devices for the Monolithic Integration of MEMS with CMOS", Proc. IEDM '95, pp. 609-612 (1995).
3. J. J. Sniegowski, E. J. Garcia, "Microfabricated Actuators and their Application to Optics," Proc. SPIE vol. 2383, pp. 46-64.
4. R. Nasby, J. Sniegowski, J. Smith, S. Montague, C.C. Barron, W. Eaton, P. McWhorter, D. Hetherington, C. Apblett, and J. Fleming, "Application of Chemical-Mechanical Polishing to Planarization of Surface-Micromachined Devices," Proc. Solid-State Sensor and Actuator Workshop, pp. 48-53, Jun. 1996.
5. J.H. Comtois, M.A. Michalicek, and C.C. Barron, "Fabricating Micro-Instruments in Surface-Micromachined Polycrystalline Silicon," 43rd IIS Conference, Orlando, FL, May, 1997.
6. J.H. Comtois, V.M. Bright, and M.W. Phipps, "Thermal Microactuators for Surface-Micromachining Processes," Proc. SPIE, vol. 2642, 1995, pp. 10-21.