Slow crack growth in single-crystal silicon

Science

Volumn 256, Issue 5063, 1992, Pages 1537-1539

  Connally, J A ^a   Brown, S B ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEAMS AND GIRDERS; CRACK PROPAGATION; FRACTURE MECHANICS; MICROELECTRONICS; RELIABILITY; RESONANCE; THIN FILM DEVICES; VIBRATIONS (MECHANICAL);

LINEAR ELASTIC FRACTURE MECHANICS; MICROMECHANICAL DEVICES; RATE-DEPENDENT CRACK GROWTH; RESONANCE-EXCITED CANTILEVER BEAMS; SINGLE-CRYSTAL SILICON BEAMS; SLOW CRACK GROWTH MONITORING; STATIC FATIGUE EFFECTS; THIN-FILM SILICON STRUCTURES;

SEMICONDUCTING SILICON;

EID: 0026882936     PISSN: 00368075     EISSN: None     Source Type: Journal    
DOI: 10.1126/science.256.5063.1537     Document Type: Article

References (0)