Charging damage during residual metal overetching

Applied Physics Letters

Volumn 74, Issue 7, 1999, Pages 932-934

  Hwang, Gyeong S ^a   Giapis, Konstantinos P ^a  

^a California Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342682208     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123413     Document Type: Article

References (11)

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