Deposition of GaN films on (1 1 1) Si substrates by alternate supply of TMG and NH3

Optical Materials

Volumn 24, Issue 4, 2004, Pages 615-619

  Gong, Jyh Rong ^a   Yeh, Ming Fa ^a   Tsai, Yu Li ^a  

^a FENG CHIA UNIVERSITY   (Taiwan)

Author keywords

GaN on Si; High temperature AlN buffer layer

Indexed keywords

DEPOSITION; FILM GROWTH; GALLIUM NITRIDE; OPTIMIZATION; PHOTOLUMINESCENCE; TRANSMISSION ELECTRON MICROSCOPY;

BUFFER LAYERS;

THIN FILMS;

EID: 0242663463     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-3467(03)00164-2     Document Type: Article

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