Thermally stable grating comprised of silsesquioxane film fabricated with hot-embossing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4991, Issue , 2003, Pages 355-365

  Hasui, Kenjiro ^a,b   Takagaki, Ikue ^a   Sugihara, Okihiro ^a   Okamoto, Naomichi ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

^b Worldwide Product Engineering   (Japan)

Author keywords

Embossing; Grating; ORMOSIL; Silsesquioxane; Sol Gel; Thermooptic coefficient

Indexed keywords

BIREFRINGENCE; COOLING; DIFFRACTION GRATINGS; HEAT TREATMENT; HEATING; LIGHT ABSORPTION; REFRACTIVE INDEX; SOL-GELS; THERMODYNAMIC STABILITY; THICK FILMS;

HOT EMBOSSING; THERMAL CYCLES;

ORGANIC COMPOUNDS;

EID: 0242524560     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.475424     Document Type: Conference Paper

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