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Volumn 108, Issue 6, 2000, Pages 604-606
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Influences of preparation conditions of sols on hardening behaviors of silica gel films for micro-patterning
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Author keywords
Acid concentration; Coating; Hardening; Patterning; Sol gel method
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Indexed keywords
HARDENING;
HYDROCHLORIC ACID;
INFRARED SPECTROSCOPY;
POLYETHYLENE GLYCOLS;
POLYMERIZATION;
PROTECTIVE COATINGS;
REFRACTIVE INDEX;
SHRINKAGE;
SILICA;
SOL-GELS;
MICRO-PATTERNING;
SILICA GEL FILMS;
CERAMIC MATERIALS;
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EID: 0033691698
PISSN: 09145400
EISSN: None
Source Type: Journal
DOI: 10.2109/jcersj.108.1258_604 Document Type: Article |
Times cited : (3)
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References (11)
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