Sol-gel fabrication and properties of optical channel waveguides and gratings made from composites of titania and organically modified silane

Optical Engineering

Volumn 41, Issue 7, 2002, Pages 1733-1737

  Que, Wenxiu ^a   Kam, Chan Hin ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Channel waveguide; Embossing; Grating; Laser writing; Organically modified silane; Reactive ion etching; Sol gel technique

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTION GRATINGS; ELLIPSOMETRY; LOW TEMPERATURE OPERATIONS; OPTICAL WAVEGUIDES; REACTIVE ION ETCHING; REFRACTIVE INDEX; SEMICONDUCTING SILICON; SILANES; SOL-GELS; THIN FILMS; TITANIUM COMPOUNDS;

CHANNEL WAVEGUIDES; EMBOSSING; LASER WRITING; ORGANICALLY MODIFIED SILANE; SOL-GEL TECHNIQUE; TITANIA;

OPTICAL COMMUNICATION EQUIPMENT;

EID: 0036649279     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1482098     Document Type: Article

References (13)

1. Sol-gel waveguide fabrication parameters: An experimental investigation
2. Fabrication of buried channel waveguides on silicon substrates using spin-on glass
3. Sol-gel integrated optical coupler by ultraviolet light imprinting
4. Sol-Gel Optics II
5. Microstructural characterization of gold-doped silica-titania sol-gel films
6. Microstructural and optical properties of sol-gel silica-titania waveguides
7. Organic-inorganic optical materials
8. Zirconia and zirconia-ORMOSIL planar waveguides prepared at room temperature
9. Sol-gel glass waveguides prepared at low temperature