3D geometric simulation of MEMS fabrication processes: A semantic approach

Proceedings of the Symposium on Solid Modeling and Applications

Volumn , Issue , 1997, Pages 376-387

  Dixit, Hrishikesh ^a   Kannapan, Srikanth ^a   Taylor, Dean L ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGEBRA; ALGORITHMS; COMPUTATIONAL LINGUISTICS; COMPUTER AIDED DESIGN; COMPUTER AIDED MANUFACTURING; COMPUTER AIDED SOFTWARE ENGINEERING; COMPUTER SIMULATION; GRAPHICAL USER INTERFACES; INTERACTIVE COMPUTER SYSTEMS; THREE DIMENSIONAL COMPUTER GRAPHICS; WIDE AREA NETWORKS;

SOFTWARE PACKAGE MEMSHAPES; WORLD WIDE WEB (WWW);

MICROELECTROMECHANICAL DEVICES;

EID: 0030672480     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)