Automatic generation of thin film process flows - Part II: Recipe generation, flow evaluation, and system framework

IEEE Transactions on Semiconductor Manufacturing

Volumn 12, Issue 1, 1999, Pages 129-138

  Zaman, Mohammed H ^a,b   Carlen, Edwin T ^c   Mastrangelo, Carlos H ^a,c  

^a IEEE   (United States)

^b Microcosm Technologies   (United States)

^c UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Process compilation; Process flow design; TCAD

Indexed keywords

ALGORITHMS; AUTOMATION; COMPUTATIONAL METHODS; COMPUTER AIDED NETWORK ANALYSIS; DATABASE SYSTEMS; ELECTRIC NETWORK SYNTHESIS; PARAMETER ESTIMATION; PROCESS ENGINEERING; THIN FILMS;

PROCESS COMPILATIONS; PROCESS FLOW DESIGN; SOFTWARE PACKAGE TCAD;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0033078112     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.744534     Document Type: Review

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