Synchrotron White Beam X-Ray Topography and High Resolution Triple Axis X-Ray Diffraction Studies of Defects in SiC Substrates, Epilayers and Devices

Materials Science Forum

Volumn 433-436, Issue , 2003, Pages 247-252

  Dudley, Michael ^a   Huang, Xianrong ^a   Vetter, William M ^a   Neudeck, Philip G ^b  

^a STONY BROOK UNIVERSITY   (United States)

^b NASA GLENN RESEARCH CENTER   (United States)

Author keywords

Defect; Micropipe; Mismatch; Screw Dislocation; Synchrotron Topography; Triple Axis Diffraction

Indexed keywords

CRYSTAL DEFECTS; DISLOCATIONS (CRYSTALS); SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

X-RAY TOPOGRAPHY;

SILICON CARBIDE;

EID: 0242413755     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.433-436.247     Document Type: Conference Paper

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