Gettering of Co in Si by high-energy B ion-implantation and by p/p+ epitaxial Si

Applied Physics Letters

Volumn 77, Issue 24, 2000, Pages 4010-4012

  Benton, J L ^a   Boone, T ^a   Jacobson, D C ^a   Rafferty, C S ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042226914     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1332828     Document Type: Article

References (7)

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