Parameter optimisation of Ti-DLC coatings using statistically based methods

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 585-590

  Villiger, P ^a   Sprecher, Ch ^a   Peters, J A ^a  

^a Surface Technology Group   (Switzerland)

Author keywords

Coating design; Factorial experimental design; Magnetron sputtering; Ti DLC coatings

Indexed keywords

DESIGN; DIAMOND-LIKE COATING; OPTIMIZATION; SPUTTERING; TITANIUM;

ACETYLENE; ARGON; ELECTRIC POTENTIAL; MAGNETRON SPUTTERING; NITROGEN; PARTIAL PRESSURE; TITANIUM;

FRACTIONAL FACTORIAL EXPERIMENTAL DESIGN;

COATINGS;

EID: 0033387791     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00073-0     Document Type: Conference Paper

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