Mechanical properties and performance of magnetron-sputtered graded diamond-like carbon films with and without metal additions

Diamond and Related Materials

Volumn 11, Issue 3-6, 2002, Pages 1139-1142

  Bauer, C ^a   Leiste, H ^a   Stuber M ^a   Ulrich, S ^a   Holleck, H ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Amorphous carbon; Mechanical properties; Physical vapor deposition; Titanium carbide (TiC)

Indexed keywords

DEPOSITION; ION BOMBARDMENT; MAGNETRON SPUTTERING; RESIDUAL STRESSES; SILICON; SUBSTRATES; TITANIUM CARBIDE;

METAL ADDITIONS;

DIAMONDS;

DIAMOND-LIKE CARBON; HARDNESS; MECHANICAL PROPERTY; PERFORMANCE ASSESSMENT; TITANIUM CARBIDE; TRIBOLOGY;

EID: 0036508212     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00714-2     Document Type: Article

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