Large Area Sputter Deposition of Novel Transparent Conductive Oxide Materials for Displays Application

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2003, Pages 175-180

  Betz, U ^a   Marthy, J ^a   Atamny, F ^a  

^a Balzers AG   (Liechtenstein)

Author keywords

Displays application; Large area coating; Sputter deposition; Transparent conductive coatings

Indexed keywords

ATOMIC FORCE MICROSCOPY; FLAT PANEL DISPLAYS; GLASS; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; OPACITY; OPTOELECTRONIC DEVICES; SECONDARY ION MASS SPECTROMETRY; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

DISPLAYS APPLICATION;

SPUTTER DEPOSITION;

EID: 0242290785     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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