Oxygenated polymeric thin films deposited from toluene and oxygen by remote plasma enhanced chemical vapor deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 5, 2003, Pages 1655-1664

  Barranco, A ^a   Cotrino, J ^a,b   Yubero, F ^a   Gonzalez Elipe A R ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE SEVILLA   (Spain)

^b UNIVERSITY OF SEVILLE   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; OXYGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASTIC FILMS; TOLUENE;

POLYMERIC THIN FILMS;

THIN FILMS;

EID: 0142090638     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1597891     Document Type: Conference Paper

References (38)

1. H. Yasuda, Plasma Polymerization (Academic, New York, 1985).
2. Plasma Processing of Polymers, edited by R. d'Agostino, P. Favia, and F. Fracassi (Kluwer Academic, Dordrecht, 1996), and references therein.
3. Plasma Deposition, Treatment, and Etching of Polymers, edited by R. d'Agostino (Academic, New York, 1997).
4. A. Grill, Cold Plasma in Materials Fabrication (IEEE, New York, 1994).
5. H. Biederman and Y. Osada, Plasma Polymerization Processes (Elsevier, New York, 1992).
6. P. K. Chu, J. Y. Chen, L. P. Wang, and N. Huang, Mater. Sci. Eng., R. 36, 143 (2000).
7. C. M. Chan, T. M. Ko, and H. Hiraoka, Surf. Sci. Rep. 24, 1 (1996).
8. F. F. Shi, Surf. Coat. Technol. 82, 1 (1996).
9. I. Retzko, J. F. Friedrich, A. Lippitz, and W. E. S. Unger, J. Electron Spectrosc. Relat. Phenom. 121, 111 (2001).
10. S. Durrant, S. G. Castro, J. I. Cisneros, N. C. da Cruz, and M. A. Bica de Moraes, J. Vac. Sci. Technol. A 14, 118 (1996).
11. J. Wang, S. F. Durrant, and M. A. B. Bica de Moraes, J. Non-Cryst. Solids 262, 216 (2000).
12. G. W. Phohaska and G. K. Nickoson, J. Polym. Sci., Part A: Polym. Chem. 27, 2633 (1989).
13. S. Durrant, R. T. de Oliveira, S. G. C. Castro, L. E. Bolívar-Marínez, D. S. Galvao, and M. A. Bica de Moraes, J. Vac. Sci. Technol. A 15, 1334 (1997).
14. N. Dilsiz and G. Akovali, Polymer 37, 333 (1996).
15. H. Biederman, P. Hlídek, J. Zemek, D. Slavínská, J. Jezek, P. Zakouril, and J. Glosik, Vacuum 46, 1413 (1995).
16. P. Favia, M. Creatore, F. Palumbo, V. Colaprico, and R. d'Agostino, Surf. Coat, Technol. 142, 1 (2001).
17. P. Favia, F. Palumbo, R. d'Agostino, S. Lamponi, A. Magnani, and R. Barbucci, Plasmas Polym. 3, 77 (1998).
18. R. Daw, T. O'Leary, J. Kelly, R. D. Short, M. Cambray-Deakin, A. J. Devlin, I. M. Brook, A. Schutt, and S. Khotari, Plasmas Polym. 4, 113 (1999).
19. C. K. Harnett, G. W. Coates, and H. G. Craighead, J. Vac. Sci. Technol. B 19, 2842 (2001).
20. J. Munoz, A. Bratov, R. Mas, N. Abramova, C. Dominguez, and J. Bartroli, J. Electrochem. Soc. 143, 2020 (1996).
21. A. Barranco, F. Yubero, J. P. Espinós, A. R. González-Elipe, and J. Cotrino, Spanish Patent Nos. 200100911 and PCT ES02/00192 (2001).
22. A. Barranco, J. Cotrino, F. Yubero, J. P. Espinós, and A. R. Gonzalez-Elipe, Chem. Mater. (in press).
23. A. Barranco, J. Cotrino, F. Yubero, J. P. Espinós, J. Benítez, C. Clerc, and A. R. González-Elipe, Thin Solid Films 401, 150 (2001).
24. A. Barranco, F. Yubero, J. Cotrino, J. P. Espinós, J. Benitez, T. C. Rojas, J. Allain, T. Girardeau, J. P. Rivière, and A. R. González-Elipe, Thin Solid Films 396, 9 (2001).
25. A. Barranco, F. Yubero, J. P. Espinós, J. Benitez, A. R. González-Elipe, J. Cotrino, J. Allain, T. Girardeau, and J. P. Rivière, Surf. Coat. Technol. 142, 856 (2001).
26. J. Cotrino, A. Palmero, V. Rico, A. Barranco, and A. R. González-Elipe, J. Vac. Sci. Technol. B 19, 410 (2001).
27. J. Yen and I. Lindau, At. Data Nucl. Data Tables 32, 1 (1985).
28. F. Werner, D. Korzec, and J. Engemann, Plasma Sources Sci. Technol. 3, 473 (1994).
29. R. W. B. Pearse and A. G. Gaydon, The Identification of the Molecular Spectra (Chapman and Hall, London, 1976).
30. National Institute of Standard and Technology, http://physics.nist.gov (2002).
31. E. Pretsch, T. Clerc, J. Seibl, and W. Simon, Tabellen zur Spectrukturaufklärung Organischer Verbindungen mit Spektroskopischen Metoden (Springer, Berlin, 1993).
32. D. Briggs, Practical Surface Analysis, 2nd ed., edited by D. Briggs and M. P. Seah (Wiley, New York, 1990).
33. H. Yasuda and T. S. Hsu, J. Polym. Sci., Polym. Chem. Ed. 15, 81 (1977).
34. H. Yasuda and T. S. Hsu, J. Polym. Sci., Polym. Chem. Ed. 15, 2411 (1977).
35. H. Yasuda, C. Marsh, M. O. Bumgarner, and N. Morosoff, J. Appl. Polym. Sci. 19, 2845 (1975).
36. H. Yasuda and H. C. Marsh, J. Appl. Polym. Sci. 19, 2981 (1975).
37. D. T. Clark and H. Harrison, J. Polym. Sci., Polym. Chem. Ed. 19, 1945 (1981).
38. D. T. Clark, B. J. Cromarty, and A. Dilks, J. Polym. Sci., Polym. Chem. Ed. 16, 3173 (1978).