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Volumn 403, Issue 6770, 2000, Pages 638-640

Non-destructive determination of strain 100-nanometre spatial resolution

Author keywords

[No Author keywords available]

Indexed keywords

NANOPARTICLE; SILICON;

EID: 0034628505     PISSN: 00280836     EISSN: None     Source Type: Journal    
DOI: 10.1038/35001035     Document Type: Article
Times cited : (123)

References (19)
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