Raman imaging of patterned silicon using a solid immersion lens

Applied Physics Letters

Volumn 73, Issue 16, 1998, Pages 2275-2277

  Poweleit, C D ^a   Gunther, A ^b   Goodnick, S ^b   Menéndez, José ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

^b Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT SCATTERING; NUMERICAL METHODS; OPTICAL INSTRUMENT LENSES; OPTICAL MICROSCOPY; OPTICAL RESOLVING POWER; OPTICAL VARIABLES MEASUREMENT; RAMAN SPECTROSCOPY; REFRACTIVE INDEX;

NUMERICAL LENS; PATTERNED SILICON; SOLID IMMERSION LENS; SPATIAL RESOLUTION;

SEMICONDUCTING SILICON;

EID: 0032547592     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121700     Document Type: Review

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