Stress measurements using ultraviolet micro-raman spectroscopy

Applied Physics Letters

Volumn 75, Issue 16, 1999, Pages 2450-2451

  Dombrowski, K F ^a   De Wolf, I ^b   Dietrich, B ^a  

^a IHP   (Germany)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000349467     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125044     Document Type: Article

References (15)

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11. Note: Throughout this letter we use the same definition of penetration depth as given in Ref. 1.
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15. 2 of the Gaussian intensity distribution. The values were determined experimentally by crossing a thin metal edge and fitting the convolution of a Gaussian profile with a step function to the measured intensity distribution.