Tunable Diode Laser Absorption Studies of Hydrocarbons in RF Plasmas Containing Hexamethyldisiloxane

Plasma Chemistry and Plasma Processing

Volumn 22, Issue 1, 2002, Pages 137-157

  Ropcke J ^a   Revalde, G ^b   Osiac, M ^a   Li, K ^c   Meichsner, J ^c  

^a Inst of Low Temp Plasma Physics   (Germany)

^b UNIVERSITY OF LATVIA   (Latvia)

^c UNIVERSITY OF GREIFSWALD   (Germany)

Author keywords

C2H6; CH3; CH4; Hexamethyldisiloxane; Laser diagnostics; Plasma chemistry; Radio frequency plasma; TDLAS

Indexed keywords

HYDROCARBONS; LASER APPLICATIONS; POLYMERS; SEMICONDUCTOR LASERS;

RADIO FREQUENCY PLASMAS;

PLASMA THEORY;

EID: 0141742429     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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