Fabrication of a microwave MEMS switch

ANTEM 2000 - Symposium on Antenna Technology and Applied Electromagnetics, Conference Proceedings

Volumn , Issue , 2000, Pages 79-82

  Denhoff, M W ^a   Grant, P D ^a   Harry, M A ^a   Yu, M ^b  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b COM DEV International ^*  (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BRIDGES; COPLANAR WAVEGUIDES; INSERTION LOSSES;

FABRICATION PROCESS; HIGH ISOLATION; LOW INSERTION LOSS; MECHANICAL DESIGN; MEMS SWITCHES; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICROWAVE SWITCH; OFF STATE;

FABRICATION;

EID: 0141729657     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ANTEM.2000.7851661     Document Type: Conference Paper

References (5)

1. J. Jason Yao and M. Frank Chang, A surface micromachined miniature switch for telecommunications applications with signal frequencies from dc up to 4 GHz, The 8th International Conference on Solid State Sensors and Actuators, and Eurosensors IX. Stockholm, Sweden, June 25-29, 1995.
2. P. D. Grant, L. Winchui, M. W. Denhoff, MA. Harry, M. Yu, and S. Peik, Microwave performance of a MEMS switch designed for rf and microwave routing, ANTEM 2000 Symposium, Winnipeg, July 30 - August 2, 2000.
3. S. Rojas, L. Zanotti, A. Borghesi, A. Sassella, and G. U. Pignatel, Characterization of silicon dioxide and phospho-silicate glass deposited films, J. Vac. Sci. Technol. B 11, 2081 (1993).
4. 2 and Related Materials: an Overview, Adv. Mater. Opt. Electron. 6, 101 (1996).
5. S. K. Ray, C. K. Maiti, S. K. Lahiri, and N. B. Chakabarti, TEOS-based PECVD of Silicon dioxide for VLSI Applications, Adv. Mater. Opt. Electron. 6, 73 (1996).