Scatterometer based scanner fingerprinting technique (ScatterLith) and its applications in image field and ACLV analysis

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5040 I, Issue , 2003, Pages 541-552

  Wang, Changan ^a   Zhang, Gary ^a   DeMoor, Stephen ^a   Boehm, Mark ^a   Littau, Mike ^b   Raymond, Chris ^b  

^a TEXAS INSTRUMENTS   (United States)

^b NANOMETRICS INC   (United States)

Author keywords

ACLV; Astigmatism; Dynamic image field; Lens curvature; Scanner fingerprinting; Scatterometer; Spherical aberration

Indexed keywords

ABERRATIONS; COMPUTER SIMULATION; FOCUSING; IMAGE ANALYSIS; INTERFEROMETERS; OPTICAL INSTRUMENT LENSES; OPTICS; SCANNING;

ACROSS CHIP LINE-WIDTH VARIATION; ASTIGMATISM; CRITICAL DIMENSIONS; IMAGE FIELD; SCANNER FINGERPRINTING TECHNIQUE; SCATTEROMETER;

LITHOGRAPHY;

EID: 0141610689     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485434     Document Type: Conference Paper

References (12)

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