Characterization of optical proximity matching for 130nm node gate line width

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5040 II, Issue , 2003, Pages 894-905

  Zheng, Sandra ^a   Zhang, Gary ^a   Wang, Chang An ^b   Detweiler, Shangting ^b  

^a CMOS1/SiTD ^*  (United States)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; COHERENT LIGHT; LENSES; MATHEMATICAL MODELS;

EFFECTIVE PARTIAL COHERENCE; OPTICAL PROXIMITY CORRECTION; SCATTEROMETER;

PHOTOLITHOGRAPHY;

EID: 0141794539     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485431     Document Type: Conference Paper

References (6)

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