Evaluating scanner lens spherical aberration using scatterometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5040 III, Issue , 2003, Pages 1456-1464

  Wang, Changan ^a   Zhang, Gary ^a   Tan, Colin ^a   Atkinson, Chris ^a   Boehm, Mark ^a   Brown, Jay ^c   Godfrey, David ^c   Littau, Mike ^b   Raymond, Chris ^b  

^a TEXAS INSTRUMENTS   (United States)

^b NANOMETRICS INC   (United States)

^c NONE

Author keywords

ACLV; Scanner; Scatterometer; Spherical aberration

Indexed keywords

ABERRATIONS; IMAGE QUALITY; LENSES; LIGHT SCATTERING; SCANNING; SCANNING ELECTRON MICROSCOPY;

ACROSS CHIP LINE WIDTH VARIATION; FINGERPRINTING TECHNIQUE; LENS QUALITY; SCANNER LENS SPHERICAL ABERRATION; SCATTEROMETER;

PHOTOLITHOGRAPHY;

EID: 0141721695     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485437     Document Type: Conference Paper

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