Effect of substrate deformation on the microcantilever beam-bending test

Journal of Materials Research

Volumn 15, Issue 9, 2000, Pages 1868-1871

  Zhang, Tong Yi ^a   Zhao, Ming Hao ^a   Qian, Cai Fu ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (DEFORMATION); ELASTIC MODULI; FINITE ELEMENT METHOD; LOADS (FORCES); POLYNOMIALS; SUBSTRATES;

MICROCANTILEVER BEAM BENDING TESTS;

CANTILEVER BEAMS;

EID: 0034285289     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2000.0270     Document Type: Article

References (9)

1. Microbridge testing of thin films under small deformation