Wet chemical cleaning of InP surfaces investigated by in situ and ex situ infrared spectroscopy

Journal of Applied Physics

Volumn 94, Issue 4, 2003, Pages 2707-2715

  Pluchery, O ^a,d   Chabal, Y J ^b,d   Opila, R L ^c,d  

^a SORBONNE UNIVERSITÉ   (France)

^b RUTGERS UNIVERSITY   (United States)

^c UNIVERSITY OF DELAWARE   (United States)

^d AGERE SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL CLEANING; ETCHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; OPTOELECTRONIC DEVICES; OXIDATION; X RAY PHOTOELECTRON SPECTROSCOPY;

SEMICONDUCTOR DEVICE PROCESSING;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0042924326     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1596719     Document Type: Article

References (40)

1. H. Lim, J. A. Baglio, N. DeCola, H. L. Park, J. I. Lee, and K. N. Kang, J. Appl. Phys 69, 7918 (1991).
2. S. Sato, A. Funyu, and H. Ikoma, Jpn. J. Appl. Phys., Part 2 35, L4 (1996).
3. S. V. Slobodchikov and K. M. Salikhov, Semiconductors 34, 284 (2000).
4. W. C. Huang, T. F. Lei, and C. L. Lee, Electron. Lett. 31, 924 (1995).
5. M. Losurdo, P. Capezzuto, and G. Bruno, J. Vac. Sci. Technol. B 14, 691 (1996).
6. S. Hearne and G. Hughes, Appl. Surf. Sci. 123, 176 (1998).
7. R. R. Sumathi, G. Sasikala, N. Dharmarasu, M. S. Kumar, and J. Kumar, Bull. Electrochemistry 15, 303 (1999).
8. R. R. Sumathi, M. S. Kumar, N. Dharmarasu, and J. Kumar, Mater. Sci. Eng., B 60, 25 (1999).
9. K. Vaccaro, H. M. Dauplaise, A. Davis, S. M. Spaziani, and J. P. Lorenzo, Appl. Phys. Lett. 67, 527 (1995).
10. H. M. Dauplaise, K. Vaccaro, A. Davis, G. O. Ramseyer, and J. P. Lorenzo, J. Appl. Phys. 80, 2873 (1996).
11. Z. Pang, K. C. Song, P. Mascher, and J. G. Simmons, J. Electrochem. Soc. 146, 1946 (1999).
12. A. Davis, K. Vaccaro, H. M. Dauplaise, W. D. Waters, and J. P. Lorenzo, J. Electrochem. Soc. 146, 1046 (1999).
13. Y. J. Chabal, Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing Symposium (Mater. Res. Soc., Pittsburgh, Pennsylvania, 1992), pp. 349-360.
14. G. W. Trucks, R. Krishnan, G. S. Higashi, and Y. J. Chabal, Phys. Rev. Lett. 65, 504 (1990).
15. L. L. Vereikina, in Khim, Svoistva Melody Anal. Tugoplavikh Soedin, edited by G. V. Samsonov (Naukova Dumka, Kiev, 1969), pp. 37-41.
16. M. K. Weldon, K. T. Queeney, J. Eng, Jr, K. Raghavachari, and Y. J. Chabal, Surf. Sci. 500, 859 (2002).
17. Y. J. Chabal, M. A. Hines, and D. Feijoo, J. Vac. Sci. Technol. A 13, 1719 (1995).
18. K. T. Queeney, H. Fukidome, E. E. Chaban, and Y. J. Chabal, J. Phys. Chem. B 105, 3903 (2001).
19. H. Nienhaus and W. Monch, Surf. Sci. 328, L561 (1995).
20. H. Nienhaus, Phys. Rev. B 56, 13 194(1997).
21. A. Nemcsics, I. Mojzes, and L. Dobos, Microelectron. Reliab. 39, 1505 (1999).
22. C. Kaneshiro, T. Sato, and H. Hasegawa, Jpn. J. Appl. Phys., Part 1 38, 1147 (1999).
23. A. W. Hassel, M. Aihara, and M. Seo, Electrochim. Acta 45, 4673 (2000).
24. D. Kikuchi, Y. Matsui, and S. Adachi, J. Electrochem. Soc. 147, 1973 (2000).
25. A. M. Liu and C. K. Duan, Physica E (Amsterdam) 9, 723 (2001).
26. S. Langa, I. M. Tiginyanu, J. Carstensen, M. Christophersen, and H. Foll, Electrochem. Solid-State Lett. 3, 514 (2000).
27. Y. J. Chabal, Surf. Sci. Rep. 8, 211 (1988).
28. O. Pluchery, R. L. Opila, M. M. Frank, and Y. J. Chabal (unpublished).
29. F. O. Libnau, O. M. Kvalheim, A. A. Christy, and J. Toft, Vib. Spectrosc. 7, 243 (1994).
30. M. Bouslama, Y. Monteil, G. Younes, C. Jardin, and M. Ghamnia, Vacuum 47, 27 (1996).
31. H. C. Neitzert, R. Fang, M. Kunst, and N. Layadi, J. Vac. Sci. Technol. B 18, 2803 (2000).
32. T. Kallstenius, U. Smith, and B. Stoltz, J. Electrochem. Soc. 146, 749 (1999).
33. D. Kikuchi and S. Adachi, Mater. Sci. Eng., B 76, 133 (2000).
34. G. M. Vanalme, L. Goubert, R. L. Van Meirhaeghe, F. Cardon, and P. Van Daele, Semicond. Sci. Technol. 14, 871 (1999).
35. M. S. Johal, A. N. Parikh, Y. Lee, J. L. Casson, L. Foster, B. I. Swanson, D. W. McBranch, D. Q. Li, and J. M. Robinson, Langmuir 15, 1275 (1999).
36. R. A. Nyquist, C. L. Putzig, M. A. Leugers, and R. O. Kagel, The Handbook of Infrared and Roman Spectra of Inorganic Compounds and Organic Salts (Academic Press, New York, 1997).
37. Y. J. Chabal, M. K. Weldon, Y. Caudano, B. B. Stefanov, and K. Raghavachari, Physica B 274, 152 (1999).
38. M. K. Weldon, K. T. Queeney, Y. J. Chabal, B. B. Stefanov, and K. Raghavachari, J. Vac. Sci. Technol. B 17, 1795 (1999).
39. B. B. Stefanov, A. B. Gurevich, M. K. Weldon, K. Raghavachari, and Y. J. Chabal, Phys. Rev. Lett. 81, 3908 (1998).
40. See http://srdata.nist.gov/xps/