Analysis of the fabrication process of Nb/Al-AlNx/Nb tunnel junctions with low RnA values for SIS mixers

IEEE Transactions on Applied Superconductivity

Volumn 13, Issue 2 I, 2003, Pages 127-130

  Iosad, N N ^a   Kroug, M ^a   Zijlstra, T ^a   Ermakov, A B ^b   Jackson, B D ^c   Zuiddam, M ^a   Meijer, F E ^a   Klapwijk, T M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b INSTITUTE OF RADIO ENGINEERING AND ELECTRONICS   (Russian Federation)

^c SRON NETHERLANDS INSTITUTE FOR SPACE RESEARCH   (Netherlands)

Author keywords

Glow discharges; Superconducting devices; Tunneling

Indexed keywords

DIFFUSION; ELECTRON BEAM LITHOGRAPHY; GLOW DISCHARGES; MIXER CIRCUITS; NITRIDING; PLASMA HEATING;

TUNNEL BARRIER FORMATION;

TUNNEL JUNCTIONS;

EID: 0042443364     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2003.813662     Document Type: Conference Paper

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