Optimization of RF- And DC-sputtered NbTiN Films for integration with Nb-based SIS junctions

IEEE Transactions on Applied Superconductivity

Volumn 9, Issue 2 PART 2, 1999, Pages 1716-1719

  Losad, N N ^a   Jackson, B D ^b   Klapwijk, T M ^c   Polyakov, S N ^d   Dmitriev, P N ^a   Gao, J R ^b  

^a UNIVERSITY OF GRONINGEN   (Netherlands)

^b MOSCOW STATE UNIVERSITY   (Russian Federation)

^c INSTITUTE OF RADIO ENGINEERING AND ELECTRONICS   (Russian Federation)

^d SRON NETHERLANDS INSTITUTE FOR SPACE RESEARCH   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; ION BOMBARDMENT; MAGNETRON SPUTTERING; NIOBIUM COMPOUNDS; OPTIMIZATION; PRESSURE EFFECTS; SPUTTER DEPOSITION; SUBSTRATES; SUPERCONDUCTING TRANSITION TEMPERATURE; SUPERCONDUCTIVITY; SURFACES;

DC SPUTTERING; NEGATIVE BIASING; STRIPLINE MATERIAL; THERMALIZATION; UNIFORMITY;

SUPERCONDUCTING FILMS;

EID: 0032645429     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/77.784784     Document Type: Article

References (14)

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