Study of ion beam assisted deposition of Al/AlN multilayers by comparison of computer simulation and experiment

Journal of Physics D: Applied Physics

Volumn 31, Issue 18, 1998, Pages 2241-2244

  Wang, X ^a   Charlamov, V ^b   Kolitsch, A ^a   Posselt, M ^a   Trushin, Y ^b   Moller W ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b IOFFE INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; COMPUTER SIMULATION; DEPOSITION; ION BEAMS; METALLIC FILMS; NANOSTRUCTURED MATERIALS; NITRIDES;

ION BEAM ASSISTED DEPOSITION;

METALLIC SUPERLATTICES;

EID: 0032167113     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/31/18/007     Document Type: Review

References (10)

1. Holleck H and Schier V 1995 Surf. Coat. Technol. 76/77 328
2. Sproul W D 1996 Science 273 889
3. Wang X, Kolitsch A and Möller W 1997 Appl. Phys. Lett. 71 1951
4. Wang X, Kolitsch A, Prokert F and Möller W 1997 10th Int. Conf. on Surface Modification of Metals by Ion Beams (Gatlinburg, TN)
5. Smidt F A 1990 Int. Mater. Rev. 35 (2) 61
6. Rossnagel S M and Cuomo J J 1988 Vacuum 38 (2) 73
7. Möller W 1997 Radiat. Effects Defects Solids 141 73
8. Möller W and Eckstein W 1984 Nucl. Instrum. Methods B 2 814
9. Möller W and Eckstein W 1988 Comput. Phys. Commun. 51 355
10. Harper J M E, Cuomo J J and Hentzell H T G 1985 J. Appl. Phys. 58 550