SCOPUS 정보 검색 플랫폼

Volumn 6, Issue 4, 2000, Pages 135-140

Deep ion projection lithography in PMMA: Substrate heating and ion energy concerns

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042351053 PISSN: 09467076 EISSN: None Source Type: Journal
DOI: 10.1007/s005420050182 Document Type: Article

Times cited : (3)

References (10)

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- Verfahren für Die Spannungsfreie Entwicklung Von Bestrahlten Polymethylmetacrylatschichten
- Ghica, V.¹ Glashauser, W.²

2
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- An MeV-ion implanter for large area applications
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- Hallén, A.¹ Ingemarsson, P.A.² Håkansson, P.³ Sundqvist, B.U.R.⁴ Possnert, G.⁵

3
- 0032020295
- Maskless fabrication of 3-dimensional microstructures in PMMA using a nuclear microprobe
- Kerckhove DG; Breese MBH; Marsh MA; Grime GW (1998) Maskless fabrication of 3-dimensional microstructures in PMMA using a nuclear microprobe. Nucl Instr Meth Phy Res B 136-138: 379-384
- (1998) Nucl Instr Meth Phy Res B , vol.136-138 , pp. 379-384
- Kerckhove, D.G.¹ Breese, M.B.H.² Marsh, M.A.³ Grime, G.W.⁴

4
- 0012057341
- Fabrication of monolithic integrated fiber-lens connector arrays by deep proton irradiation
- Kufner M; Kufner S (1996) Fabrication of monolithic integrated fiber-lens connector arrays by deep proton irradiation. Microsystem Technologies 2: 114-118
- (1996) Microsystem Technologies , vol.2 , pp. 114-118
- Kufner, M.¹ Kufner, S.²

5
- 0033352933
- Cut-independent quartz resonator micromachining by ion track lithography
- Rapp H; Hjort K (1999) Cut-Independent Quartz Resonator Micromachining by Ion Track Lithography. Proc IEEE Int Freq Cntrl Symp. Besançon, France, 13-16 April 1999
- (1999) Proc IEEE Int Freq Cntrl Symp. Besançon, France, 13-16 April 1999
- Rapp, H.¹ Hjort, K.²

6
- 0031272299
- Deep light ion lithography in PMMA - A parameter study
- Schrempl F; Witthuhn W (1997) Deep light ion lithography in PMMA - A parameter study. Nucl Instr Meth Phys Res B 132: 430-438
- (1997) Nucl Instr Meth Phys Res B , vol.132 , pp. 430-438
- Schrempl, F.¹ Witthuhn, W.²

7
- 0032040950
- P-LIGA: 3D-integration of microstructures with curved surfaces by deep ion irradiation
- Schrempl F; Witthuhn W (1998) P-LIGA: 3D-integration of microstructures with curved surfaces by deep ion irradiation. Nucl Instr Meth Phy Res B 139: 363-371
- (1998) Nucl Instr Meth Phy Res B , vol.139 , pp. 363-371
- Schrempl, F.¹ Witthuhn, W.²

8
- 0031549016
- Micromachining using deep ion beam lithography
- Springham SV; Osipowicz T; Sanchez JL; Gan LH; Watt F (1997) Micromachining using deep ion beam lithography. Nucl Instr Meth Phys Res B 130: 155-159
- (1997) Nucl Instr Meth Phys Res B , vol.130 , pp. 155-159
- Springham, S.V.¹ Osipowicz, T.² Sanchez, J.L.³ Gan, L.H.⁴ Watt, F.⁵

9
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- Micromachining by ion track lithography
- Thornell G; Spohr R; Veldhuizen EJ; Hjort K (1999) Micromachining by ion track lithography. Sens Act 73: 176-183
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- Thornell, G.¹ Spohr, R.² Veldhuizen, E.J.³ Hjort, K.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.