Deep proton lithographic CAD-CAM for the fabrication of monolithic micro-optical elements

LEOS Summer Topical Meeting

Volumn , Issue , 1998, Pages 17-18

  Tuteleers, P ^a   Vynck, P ^a   Ottevaere, H ^a   Baukens, V ^a   Verschaffelt, G ^a   Kufner, S ^a   Kufner, M ^a   Hermanne, A ^a   Veretennicoff, I ^a   Thienpont, H ^a  

^a VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER AIDED MANUFACTURING; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT MANUFACTURE; LITHOGRAPHY; MIRRORS; MONOLITHIC INTEGRATED CIRCUITS; OPTICAL INTERCONNECTS; SURFACE ROUGHNESS;

DEEP PROTON LITHOGRAPHY;

INTEGRATED OPTOELECTRONICS;

EID: 0031625806     PISSN: 10994742     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)