Cut-independent quartz resonator micromachining by ion track lithography

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn 1, Issue , 1999, Pages 485-488

  Rapp, Hakan ^a   Hjort, Klas ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; ETCHING; ION BEAM LITHOGRAPHY; MICROMACHINING; QUARTZ;

ION TRACK LITHOGRAPHY;

CRYSTAL RESONATORS;

EID: 0033352933     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (9)