Interfacial fracture induced by cross-sectional nanoindentation in metal-ceramic thin film structures

Acta Materialia

Volumn 51, Issue 14, 2003, Pages 4295-4305

  Elizalde, M R ^a,b   Sanchez J M ^a,b   Martinez Esnaola J M ^a,b   Pantuso, D ^c   Scherban, T ^c   Sun, B ^c   Xu, G ^c  

^a CEIT   (Spain)

^b TECNUN UNIVERSITY OF NAVARRA   (Spain)

^c INTEL CORPORATION   (United States)

Author keywords

Adhesion energy; Fracture; Interfaces; Nanoindentation; Thin films

Indexed keywords

ADHESION; CERAMIC MATERIALS; FRACTURE; INDENTATION; SURFACE CHEMISTRY;

ADHESION ENERGY;

THIN FILMS;

EID: 0042244391     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6454(03)00256-8     Document Type: Article

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