The future of equipment development and semiconductor production

Materials Science and Engineering: A

Volumn 302, Issue 1, 2001, Pages 1-5

  Maydan, Dan ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

Equipment development; Process module systems; Semiconductor production

Indexed keywords

CONSUMER PRODUCTS; INDUSTRIAL APPLICATIONS; INFORMATION DISSEMINATION; LITHOGRAPHY; MATERIALS SCIENCE;

SEMICONDUCTOR INDUSTRIES;

SEMICONDUCTOR DEVICES;

SEMICONDUCTOR;

EID: 0035871511     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5093(00)01345-9     Document Type: Article

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