Interfacial cracking in thin film structures

European Structural Integrity Society

Volumn 26, Issue C, 2000, Pages 47-71

  Martinez Esnaola J M ^a,b   Sanchez J M ^a,b   Elizalde, M R ^a,b   Martin Meizoso A ^a,b  

^a CEIT   (Spain)

^b TECNUN UNIVERSITY OF NAVARRA   (Spain)

Author keywords

Cross Sectional Nanoindentation; interface toughness; Microelectronics reliability; thin films

Indexed keywords

EID: 77957076139     PISSN: 15661369     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S1566-1369(00)80042-4     Document Type: Article

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