Nonmonotonic behavior of the scanning capacitance microscope for large dynamic range samples

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 1, 2000, Pages 405-408

  Stephenson, Robert ^a   Verhulst, Anne ^a   De Wolf, Peter ^a   Caymax, Matty ^a   Vandervorst, Wilfried ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CARRIER CONCENTRATION; COMPUTER SIMULATION; SCANNING; SEMICONDUCTOR DOPING; SEMICONDUCTOR JUNCTIONS; SEMICONDUCTOR MATERIALS;

SCANNING CAPACITANCE MICROSCOPY (SCM);

CAPACITANCE MEASUREMENT;

EID: 0033683706     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591204     Document Type: Article

References (11)

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