Multiparameter statistical design of experiments for GaN growth optimization

Physica Status Solidi (A) Applied Research

Volumn 176, Issue 1, 1999, Pages 313-317

  Hass Bar Ilan, A ^a   Zamir, S ^a   Katz, O ^a   Meyler, B ^a   Salzman, J ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; OPTIMIZATION; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR GROWTH; STATISTICAL METHODS; X RAY DIFFRACTION;

DESIGN OF EXPERIMENTS; ELECTRON CONCENTRATION; FULL WIDTH AT HALF MAXIMUM (FWHM);

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0041925618     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-396X(199911)176:1<313::AID-PSSA313>3.0.CO;2-5     Document Type: Article

References (14)

1. K. SAARINEN, P. SEPPÄLÄ, J. OILA, P. HAUTOJÄRVI, C. CORBEL, O. BRIOT, and R. AULOMBARD, Appl. Phys. Lett. 73, 3253 (1998).
2. S. KELLER, B.P. KELLER, Y.-F.WU, B. HEYING, D. KAPOLNEK, J.S. SPECK, U.K. MISHRA, and S.P. DEENBAARS, Appl. Phys. Lett. 68, 1525 (1996).
3. S. KELLER, D. KAPOLNEK, B.P. KELLER, Y.-F. WU, B. HEYING, J.S. SPECK, U.K. MISHRA, and S.P. DEENBAARS, Jpn. J. Appl. Phys. 35, L285 (1996).
4. D.D. KOLESKE, A.E. WICKENDEN, R.L. HENRY, W.J. DESISTO, and R.J. GORMAN, J. Appl. Phys. 84, 1998 (1998).
5. R.L. MASON, R.F. GUNST. and J.L. Hess, Statistical Design and Analysis of Experiments with Application to Engineering and Science, John Wiley & Sons, Inc., New York 1989.
6. H. AMANO, N. SAWAKI, I. AKASAKI, and Y. TOYODA, Appl. Phys. Lett. 48, 353 (1986).
7. S. NAKAMURA, Jpn. J. Appl. Phys. 30, L1705 (1991).
8. R, SAS Institute Inc.
9. D. KAPOLNEK, X.H. WU, B. HEYING, S. KELLER, B.P. KELLER, U.K. MISHRA, S.P. DEENBAARS, and S. SPECK, Appl. Phys. Lett. 67, 1541 (1995).
10. B.P. KELLER, S. KELLER, D. KAPOLNEK, W.-N. JIANG, Y.-F. WU, H. MASUI, X.H. WU, B. HEYING, J.S. SPECK, U.K. MISHRA, and S.P. DEENBAARS, J. Electron. Mater. 24, 1707 (1995).
11. S. GÖTZ, J. WALKER, L.T. ROMANO, and N.M. JOHNSON, Mater. Res. Soc. Symp. Proc. 449, 525 (1997).
12. D.C. LOOK and R.J. MOLNAR, Appl. Phys. Lett. 70, 3377 (1997).
13. J.P. ZHANG, D.Z. SUN, X.L. WANG, X.B. LI, M.Y. KONG, Y.P. ZENG, J.M. LI, and L.Y. LIN, J. Cryst. Growth 192, 471 (1998).
14. H. AMANO, M. IWAYA, N. HAYASHI, T. KASHIMA, M. KATSURAGAWA, T. TAKEUCHI, C. WETZEL, and I. AKASAKI, MRS Internet J. Nitride Semicond. Res. 4S1, G10.1 (1999).