Structural and mechanical properties of amorphous W-Si-N sputtered films after thermal annealing

Thin Solid Films

Volumn 441, Issue 1-2, 2003, Pages 150-160

  Marques, A P ^a   Cavaleiro, A ^a  

^a UNIVERSITY OF COIMBRA   (Portugal)

Author keywords

Hard coatings; Sputtering; Thermal annealing; W Si N coatings

Indexed keywords

AMORPHOUS ALLOYS; ANNEALING; COMPOSITION; HARDNESS; OXIDATION RESISTANCE; SPUTTERING; THERMODYNAMIC STABILITY; TRIBOLOGY;

HARD COATINGS;

INORGANIC COATINGS;

EID: 0041919791     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00914-3     Document Type: Article

References (31)

1. Shaginyan L.R., Misina M., Zemek J., Musil J., Regent F., Britun V.F. Thin Solid Films. 408:2002;136.
2. Koutzaki S.H., Krzanowski J.E., Nainaparampil J.J. Metal. Mater. Trans. A. 33A:2002;1579.
3. Cavaleiro A., Vieira M.T., Lempériére G. Thin Solid Films. 197:1991;237.
4. Cavaleiro A., Vieira M.T., Ramos F., Dias J.P. Thin Solid Films. 290-291:1996;238.
5. Cavaleiro A., Trindade B., Vieira M.T. Surf. Coat. Technol. 116-119:1999;944.
6. Louro C., Cavaleiro A. Surf. Coat. Technol. 116-119:1999;74.
7. Louro C., Cavaleiro A. Thin Solid Films. 343-344:1999;50.
8. Louro C., Cavaleiro A. Surf. Coat. Technol. 123:2000;192.
9. Antunes J.M., Cavaleiro A., Menezes L.F., Simoes M.I., Fernandes J.V. Surf. Coat. Technol. 149:2002;27.
10. Louro C., Cavaleiro A., Dub S., Smid P., Musil J., Vlcek J. Surf. Coat. Technol. 161:2003;111.
11. Lee Y.-J., Suh B.S., Rha S.K., Park C-O. Thin Solid Films. 320:1998;141.
12. C. Louro, Ph.D. Thesis, University of Coimbra, Portugal, 2000.
13. M.G. Scott, in: F.E. Luborsky (Ed.), Amorphous Metallic Alloys, chap. 10, London, 1983.
14. Louro C., Cavaleiro A. Surf. Coat. Technol. 142-144:2001;964.
15. Hegedüs E., Neugebauer J., Mészáros M. Int. J. Refract. Metals Hard Mater. 16:1998;31.
16. H.J. Goldschmidt, in: Butterworths (Ed.), Interstitial Alloys, chap. 7, London, 1967.
17. International Centre for Diffraction Data, Swarthmore, PA, Cards 15-0602, 47-1172, 03-0920.
18. International Centre for Diffraction Data, Swarthmore, PA, Cards 23-1127, 72-1988, 72-1987, 78-1990, 87-0421, 50-1501, 88-0687.
19. Reid J.S., Kolawa E., Ruiz R.P., Nicolet M.-A. Thin Solid Films. 236:1993;319.
20. Reid J.S., Kolawa E., Garland C.M., Nicolet M.-A., Cardone F., Gupta D., Ruiz R.P. J. Appl. Phys. 79:1996;1109.
21. Veprek S. J. Vac. Sci. Technol. A. 17:1999;2401.
22. Chiu C.C. J. Mater. Sci. 28:1993;5684.
23. H. Kimura, T. Masumoto, in: F.E. Luborsky (Ed.), Amorphous Metallic Alloys, Butterworths Monographs Materials, chap. 12, London, 1983.
24. M.F. Ashby, in: Butterworth-Heinemann (Eds.), Materials Selection in Mechanical Design, London, 1992.
25. Bendeddouche A., Berjoan R., Bêche E., Hillel R. Surf. Coat. Technol. 111:1999;184.
26. Grill A., Aron P.R. Thin Solid Films. 108:1983;173.
27. Cavaleiro A., Vieira M.T. Surf. Eng. 10:1994;147.
28. Niederhofer A., Nesladek P., Mannling H., Moto K., Veprek S., Jilek M. Surf. Coat. Technol. 120-121:1999;173.
29. Maex K. Maex K., van Rossum M. Properties of Metal Silicides. 1995;15 Leuven, Belgium. Chapter 1.2.
30. Musil J., Kunc F., Zeman H., Polakova H. Surf. Coat. Technol. 154:2002;304.
31. Matthews A., Leyland A. Key Eng. Mater. 206-213:2002;459.