The ultimate vacuum pressure and the characteristics of sputtered coatings

Thin Solid Films

Volumn 290-291, Issue , 1996, Pages 238-242

  Cavaleiro, A ^a   Vieira, M T ^a   Ramos, F ^a   Dias, J P ^b  

^a UNIVERSITY OF COIMBRA   (Portugal)

^b INSTITUTO PEDRO NUNES   (Portugal)

Author keywords

Coatings; Roughness; Sputtering; Ultimate vacuum pressure

Indexed keywords

ADHESION; ETCHING; HARDNESS; ION BOMBARDMENT; MAGNETRON SPUTTERING; SPUTTER DEPOSITION; SURFACE ROUGHNESS;

SCRATCH TEST ADHESION; ULTIMATE VACUUM PRESSURE (UVP);

VACUUM DEPOSITED COATINGS;

EID: 0030397794     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09178-X     Document Type: Article

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