A low voltage, large scan angle MEMS micromirror array with hidden vertical comb-drive actuators for WDM routers

Conference on Optical Fiber Communication, Technical Digest Series

Volumn 70, Issue , 2002, Pages 92-93

  Hah, Dooyoung ^a   Huang, Sophia ^a   Nguyen, Hung ^a   Chang, Hsin ^a   Wu, Ming C ^a   Toshiyoshi, Hiroshi ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; MICROACTUATORS; MIRRORS; POLYSILICON; ROUTERS; WAVELENGTH DIVISION MULTIPLEXING;

MICROMIRROR ARRAYS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036439984     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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2. A. Husain, "MEMS-based photonic switching in communications networks," in OEC 2001, Paper WX1.
3. R. Ryf, et al., "1296-port MEMS Transparent Optical Crossconnect with 2.07 Petabit/s Switch Capacity," in OFC 2001, Postdeadline Paper PD28.
4. J.S. Patel and Y. Silberberg "Liquid crystal and grating-based multiple-wavelength cross-connect switch," IEEE Photon. Technol. Lett., 7, 514-516 (1995).
5. S. Miller, K. Turner, and N. Macdonald, "Micro-electro-mechanical scanning probe instruments for array architectures," Rev. Sci. Instrum., 68, 4155-4162 (1997).
6. J.-L.A. Yeh, H. Jiang, and N.C. Tien, "Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator," J. Micro-electromech. Syst., 8, 456-465 (1999).