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Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 68-75

Influence of Ti addition on the properties of W-Ti-C/N sputtered films

(3) Cavaleiro, A a Trindade, B a Vieira, M T a

a UNIVERSITY OF COIMBRA (Portugal)

Author keywords

Adhesion; Hardness; Sputtering; Structural analysis; W Ti C N hard coatings

Indexed keywords

COMPOSITION; GRAIN SIZE AND SHAPE; SPUTTERING; TITANIUM; X RAY DIFFRACTION;

CRITICAL LOADS;

THIN FILMS;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 0041856432 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00328-1 Document Type: Article

Times cited : (55)

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