Crystalline structure of very hard tungsten carbide thin films obtained by reactive pulsed laser deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 1, 1999, Pages 249-255

  Mihailescu, I N ^a   Gyorgy, Eniko ^a   Marin, G ^a   Popescu, M ^a   Teodorescu, V S ^a,b   Van Landuyt, J ^b   Grivas, C ^c   Hatziapostolou, A ^c  

^a INSTITUTE OF ATOMIC PHYSICS   (Romania)

^b UNIVERSITY OF ANTWERP   (Belgium)

^c INSTITUTE OF ELECTRONIC STRUCTURE AND LASER   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033479319     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581579     Document Type: Article

References (30)

1. New Treaty of Mineral Chemistry, edited by P. Pascal (Masson, Paris, 1959), Vol. XIV, pp. 877-886.
2. L. Liu, L. Bing, A. X. Zheao, M. X. Ming, G. Z. Zhong, and D. Y. DuChin, Sci. Bull. Acad. China 39, 1166 (1994).
3. V. I. Marusina, G. A. Iskhakova, Kh. Rayhimyanov, and C. Novosihirok, Sov. Powder Metall. Cer. (USA) 31, 870 (1992).
4. Pulsed Laser Deposition of Thin Films, edited by D. G. Chrisey and G. K. Hubler (Wiley, New York, 1994).
5. E. Fogarassy, A. Slaoui, C. Fuchs, and J. P. Stoquet, Appl. Surf. Sci. 46, 195 (1990).
6. V. Craciun, D. Craciun, and I. W. Boyd, Mater. Sci. Eng., B 18, 178 (1993).
7. I. N. Mihailescu, N. Chitica, L. C. Nistor, M. Popescu, V. S. Teodorescu, I. Ursu, A. Andrei, A. Barborica, A. Luches, M. Luisa De Georgi, A. Perrone, and B. Dubreuil, J. Hermann, J. Appl. Phys. 74, 5781 (1993).
8. I. N. Mihailescu, N. Chitica, V. S. Teodorescu, M. Luisa De Giorgi, G. Leggieri, M. Martino, A. Perrone, and B. Dubreuil, J. Vac. Sci. Technol. A 11, 2577 (1993).
9. M. L. De Giorgi, G. Leggieri, A. Luches, M. Martino, A. Perrone, G. Majni, P. Mengucci, J. Zemek, and I. N. Mihailescu, Appl. Phys. A: Mater. Sci. Process. 60, 275 (1995).
10. G. Leggieri, A. Luches, M. Martino, A. Perrone, G. Majni, P. Mengucci, and I. N. Mihailescu, Thin Solid Films 258, 40 (1995).
11. I. N. Mihailescu, A. Lita, V. S. Teordorescu, A. Luches, M. Martino, A. Perrone, and M. Gartner, J. Mater. Sci. 31, 2839 (1996).
12. B. Jönsson and S. Hogmark, Thin Solid Films 114, 257 (1984).
13. M. Petrascu, I. Berceanu, I. Brancusi, A. Buta, M. Duma, C. Grama, I. Lazar, I. Mihai, M. Petrovici, V. Simion, M. Mihaila, and I. Ghita, Nucl. Instrum. Methods Phys. Res. B 4, 396 (1984).
14. I. Apostol, C. Craciun, M. Dinescu, I. N. Mihailescu, I. Ursu, L. C. Nistor, Al. Popa, V. S. Teodorescu, A. M. Prokhorov, N. I. Chaplier, and V. I. Konov J. Phys. D 17, 709 (1984).
15. I. Apostol, M. Dinescu, Al. Hening, I. N. Mihailescu, A. M. Prokhorov, V. I. Konov, I. Ursu, and N. I. Chaplier, J. Appl. Phys. 58, 1765 (1985).
16. S. I. Anisimov, D. Bauerle, and B. S. Luk'yanchuk, Phys. Rev. B 48, 12076 (1993).
17. ASTM, Publication No. 42-853.
18. ASTM, Publication No. 20-1316.
19. New Treaty of Mineral Chemistry, edited by P. Pascal (Masson, Paris, 1959), Vol. XIV, pp. 877-886 (in French).
20. Strong Materials, edited by P. Kelly (MacMillan, New York, 1986).
21. R. Bertoncello, A. Casagrande, M. Casarin, A. Glisenti, E. Lanzoni, L. Mirenghi, and E. Tondello, Surf. Interface Anal. 18, 526 (1992).
22. H. Eschnauer, Thin Solid Films 73, 1 (1980).
23. Engineering Techniques, Précis M1I, No. M70-137 (in French).
24. Handbook of X-Rays, edited by E. S. Kaelble (McGraw-Hill, New York 1967).
25. G.-Q. Song, PhD thesis, Louis Pasteur University, Strasbourg, 1995 (in French).
26. M. Braun and K. Sedlatschek, Niobium, Tantalum, Molybdenum and Tungsten, Conference Proceedings of the University of Sheffield, 20-22 September 1960, edited by A. G. Quarrell (Elsevier, New York, 1961), p. 347.
27. Y. Zhang, Z. Zhou, and H. Li, Appl. Phys. Lett. 68, 634 (1996).
28. P. H. Feng, Appl. Phys. Lett. 69, 136 (1996).
29. S. Bohr, R. Haubner, and B. Lux, Appl. Phys. Lett. 68, 1075 (1996).
30. A. Gorbunov and V. Konov, Proceedings of Laser Advanced Material Processing, Nagaoka, Japan, (June 1992), p. 1061.