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Volumn 230-232, Issue , 2002, Pages 627-630
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Structural and thermal behaviour of a W-Ti-N sputtered film after thermal annealing
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Author keywords
Hard Coatings; Residual Stresses; Thermal Annealing; W Ti N
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Indexed keywords
ANNEALING;
COMPRESSIVE STRESS;
HARDNESS;
HIGH TEMPERATURE EFFECTS;
SPUTTER DEPOSITION;
THERMAL EXPANSION;
TUNGSTEN COMPOUNDS;
HARD COATINGS;
METALLIC FILMS;
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EID: 0036429051
PISSN: 10139826
EISSN: 16629795
Source Type: Book Series
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (4)
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