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Volumn 230-232, Issue , 2002, Pages 627-630

Structural and thermal behaviour of a W-Ti-N sputtered film after thermal annealing

Author keywords

Hard Coatings; Residual Stresses; Thermal Annealing; W Ti N

Indexed keywords

ANNEALING; COMPRESSIVE STRESS; HARDNESS; HIGH TEMPERATURE EFFECTS; SPUTTER DEPOSITION; THERMAL EXPANSION; TUNGSTEN COMPOUNDS;

EID: 0036429051     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Conference Paper
Times cited : (1)

References (4)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.