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Volumn 151-152, Issue , 2002, Pages 495-504
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The effects of a third element on structure and properties of W-C/N
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Author keywords
Hard coatings; Interstitial phases; Tungsten carbide; Tungsten nitride; W C N M; W N Si
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Indexed keywords
AMORPHIZATION;
CARBIDES;
COATING TECHNIQUES;
SOLUBILITY;
SPUTTER DEPOSITION;
STABILITY;
TRANSFORMATION KINETICS;
THIN FILMS;
INORGANIC COATING;
MECHANICAL PROPERTY;
SPUTTERING;
TUNGSTEN CARBIDE;
TUNGSTEN NITRIDE;
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EID: 0036496344
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(01)01640-1 Document Type: Article |
Times cited : (9)
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References (41)
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