Micromolding: a powerful tool for large-scale production of precise microstructures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2879, Issue , 1996, Pages 156-167

  Weber, Lutz ^a   Ehrfeld, Wolfgang ^a   Freimuth, Herbert ^a   Lacher, Manfred ^a   Lehr, Heinz ^a   Pech, Bernhard ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

LIGA TECHNIQUE; MICROMOLDING; MICROOPTICAL COMPONENTS;

BIOREACTORS; CHEMICAL REACTORS; COMPUTER SIMULATION; FABRICATION; LITHOGRAPHY; MICROELECTRONICS; MICROSTRUCTURE; MOLDING; POLYMERS; TECHNOLOGY;

MICROMACHINING;

EID: 0030421617     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)